Electron beam and ion plasmic equipment

One of main course of “ORION” “RD&P Center” developments is design high-precision electron beam and ion plasmic equipment and techniques. The initial works in this field began in 1946.

For the past years there were formed theoretical bases of designing units for forming electron and ion beams with the set energetic and geometrical parameters, software for mathematical simulation of processes of forming beams of charged particles and their interacting with substance. There was created and introduced plants and assemblies for electron beam weld: ELA 50/5, ELA 60/15, ELUMS, ELUS, parametric series of ion sources and magnetrons.

“ORION” “RD&P Center” is the unique in Russia in the field of development of equipment for dimensional processing by electron beam. The equipment helps to produce units of microphotoelectronics, microelectronics and micromechanics with a element basic size less than 1 microns. The equipment for dimensional processing and electron beam weld apply in machine, aircraft industry and exact instrumentation technologies.

“ORION” “RD&P Center” produces equipment for electron beam weld and miniature weld, ion sources, magnetrons and ion plasma equipment on their basis for microelectronics and microphotoelectronics units’ production.

Electron beam equipment

Ion plasmic equipment